ETR 253 - Semiconductor Manufacturing Equipment Technology I

Institution:

J Sargeant Reynolds Community College

Subject:

Description:

Studies equipment and systems used in the manufacturing of semiconductor devices. Includes topics such as vacuum and leak detection systems; RF power and plasma generation; pneumatic and hydraulic actuators and sensors; and systems trouble shooting and maintenance. Includes topics such as process wafer handling; robotics; control process chamber modules and interfaces; wafer throughput factors; clean room gas, chemical, and equipment delivery systems; semiconductor equipment layout, installation and repair; and other related topics. Parts I and II may be taken out of sequence. Prerequisite: ETR 273 and ETR 203 or equivalent. Lecture 3 hours. Laboratory 3 hours. Total 6 hours per week.

Credits:

4.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Multiple

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.reynolds.edu

Phone Number:

(804) 371-3000

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

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