TECH 4394 - Microelectronics Manufacturing II

Institution:

Texas State University

Subject:

Description:

This is an intermediate level course in integrated circuit processing. Topics covered include: atomic models for diffusion, oxidation and ion implantation; topics related to thin film processes such as chemical vapor deposition, physical vapor deposition; planarization by chemical-mechanical polishing and rapid thermal processing; and process integration for bipolar and MOS device fabrication. Students will design processes and model them using a simulation tool such as SUPREM.

Credits:

0.00 - 3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.txstate.edu

Phone Number:

(512) 245-2111

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

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