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Institution:
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Texas State University
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Subject:
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Description:
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Topics include: atomic models for diffusion, oxidation and ion implantation; topics related to thin film processes i.e. CVD, PVD; planarization by chemical-mechanical polishing and rapid thermal processing; and process integration for bipolar and MOS device fabrication. Students will design processes and model them using a simulation. Prerequisite: MFGE 4392. ( WI)
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Credits:
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0.00 - 3.00
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Credit Hours:
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Prerequisites:
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Corequisites:
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Exclusions:
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Level:
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Instructional Type:
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Lecture
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Notes:
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Additional Information:
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Historical Version(s):
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Institution Website:
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Phone Number:
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(512) 245-2111
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Regional Accreditation:
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Southern Association of Colleges and Schools
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Calendar System:
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Semester
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