SMFT 2341 - Vacuum Principles And rf Plasma Systems

Institution:

Austin Community College District

Subject:

Description:

A study ofvacuum principles and RF plasma systems in the semiconductor manufacturing industry. Vacuum topics include principles, components, systems, leak detection, and safety practices. RF plasma topics include plasma physics, RF power amplifi cation and oscillators, transmission line, impedance matching, and safety. Fee: $16.00 Insurance Fee: $3.50 Skills: B Course Type: W

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Multiple

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.austincc.edu

Phone Number:

(512) 223-7000

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

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