NANO 58 - Micro & Nano Fabrication Techniques Laboratory

Institution:

Foothill College

Subject:

Description:

This course involves hands on practical laboratory fabrication experience, process simulation using SUPREM or ATHENA, and testing of a simple fabricated device. Emphasis is on the practical aspects of fabrication, such as safety, silicon wafer cleaning, lithography, etching, oxidation, diffusion, ion implantation, deposition, and wafer testing. Process simulators (SUPREM or ATHENA) are used to illustrate concepts, provide insight to the lab experience, and compare actual results to expected results. Class size will be limited and divided into groups. In addition to class lectures, each group will meet once a week for a minimum of a 4-hour guided lab session. Each group will be guided by an instructor or teaching assistant. The laboratory guide will give a demonstration of the fabrication equipment and the process, and then individuals will be able to participate in processing under his or her supervision. Prerequisite: NANO 56 or NANO 57. Five hours lecture. GE Area: Non-GE Applicable

Credits:

5.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

09/01/2007 - 08/30/2008 

Institution Website:

www.foothill.edu

Phone Number:

(650) 949-7777

Regional Accreditation:

Western Association of Schools and Colleges

Calendar System:

Quarter

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