NANO 57 - Introduction to Micro & Nano Fabrication Techniques

Institution:

Foothill College

Subject:

Description:

Introduction to the underlying principles, techniques, and applications of fabrication technology from the top down and bottom up perspective. For students interested in the physical bases and practical methods of micro and nanoscale fabrication technology or the impact of technology on device design. Topics: the fundamental principles and methods of semiconductor/ IC fabrication processes, crystal growth, oxidation, doping, etching, deposition, current lithography techniques, next generation lithography techniques, molecular manufacturing, DNA templating, protein assembly, packaging, back-end processing, quality control and yield analysis. Prerequisites: ENGR 76 or NANO 51; NANO 52 or equivalent. Five hours lecture. GE Area: Non-GE Applicable

Credits:

5.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

09/01/2007 - 08/30/2008 

Institution Website:

www.foothill.edu

Phone Number:

(650) 949-7777

Regional Accreditation:

Western Association of Schools and Colleges

Calendar System:

Quarter

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