NANO 56 - Principles of Mems, Nems & Sensors

Institution:

Foothill College

Subject:

Description:

Introduction to the underlying principles and applications of micro and nano machined sensors and actuators, focusing on the use of fabrication technology for their realization. Basic mechanisms of transduction and the relative merits of different technologies. The basic principles for sensing displacement, force, pressure, acceleration, temperature, gases, and other physical parameters. Industry applications, design challenges, and manufacturing issues. Emerging micro and nano machining techniques and directions for future research. Prerequisite: ENGR 76 or NANO 51 or equivalent. Five hours lecture. GE Area: Non-GE Applicable

Credits:

5.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

09/01/2007 - 08/30/2008 

Institution Website:

www.foothill.edu

Phone Number:

(650) 949-7777

Regional Accreditation:

Western Association of Schools and Colleges

Calendar System:

Quarter

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