EE 4391 - Technology of Plasma Class and Laboratory

Institution:

The University of Texas at Dallas

Subject:

Description:

Plasmas are critical to making the best electronic devices. This class and laboratory will be an introduction to the technology required to make and use these plasmas. Topics include: high-vacuum technology (gas properties, pumps, pressure gauges, flow-meters, gas composition analysis) and plasma technology (etch, deposition, and lamps). Students will make hands-on measurements in the laboratory that reinforce the theory presented in class. Prerequisites: CE/EE 3300 and CE/EE 3310. Recommended: EE 3341. (2-1) Y

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.utdallas.edu

Phone Number:

(972) 883-2111

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

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