CHE 4950 - Introduction to MicroElectroMechanical Systems (MEMS)

Institution:

Tennessee Technological University

Subject:

Chemical Engineering

Description:

Lec. 3. Credit 3 Prerequisite: Senior standing in engineering or consent of instructor. Introduce the design, fabrication, and performance of MEMS devices. Topics include bulk and surface micromachining, photolithography, sensors, actuation systems, optical MEMS, and microcantilever based systems.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.tntech.edu

Phone Number:

(931) 372-3223

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

The Course Profile information is provided and updated by third parties including the respective institutions. While the institutions are able to update their information at any time, the information is not independently validated, and no party associated with this website can accept responsibility for its accuracy.