NFAB 215 - Materials Modification in Nanofabrication

Institution:

Harrisburg Area Community College-Harrisburg

Subject:

Nanofabrication

Description:

The process used in modifying material properties in nanofabrication. Included are growth and annealing processes utilizing horizontal and vertical furnaces as well as rapid thermal annealing. The impact of thermal processing and thermal processing on defects; gettering; impurities; and overall electrical, mechanical, optical, electrical, and chemical properties are studied. Students grow and measure gate and field oxides, implant and activate source and drain regions, and evaluate thermal budget requirements using state-of-the-art tools. Included also are other modification technologies such as ion implantation, diffusion and surface preparation and treatment. Substrate preparation processing such as slicing, etching, polishing and epitaxial growth are covered. Prerequisite: Restructed, see program coordinator.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Multiple

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.hacc.edu

Phone Number:

(717) 780-2300

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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