TEL 262 - Thin Film in Nanofabrication

Institution:

Delaware County Community College

Subject:

Electronics Technology

Description:

This course covers advanced thin film deposition and etching practices in nanofabrication. Advanced deposition techniques covered in the first part of the course include atmosphere, low-pressure and plasma enhanced chemical vapor deposition, sputtering, thermal and electron beam evaporation. The study of materials includes dielectrics, polysilicon and metals. The second part of the course focuses on advanced etching practices and techniques emphasizing reactive ion etching, high-density plasma systems, ion beam etching, and wet chemical etching. Students will receive hands-on experience in depositing and etching dielectric, semiconductor, and metallic materials using state-of-the-art tools and practicing many of the steps critical to nanofabrication of semiconductor devices including microelectronics, MEMs devices, display structures, and structures used in the biotechnology fields. Upon successful completion of this course, students should be able to: Explain all chemical vapor deposition (CVD) processes used in nanofabrication; Explain the operation of CVD equipment; Describe the uses of different CVD thin films in nanofabrication; Explain all physical vapor deposition (PVD) processes used in nanofabrication; Set up and operate equipment to perform PVD; Describe the uses of different PVD thin films in nanofabrication; Explain the processes in wet chemical etching techniques; Set up and operate equipment to perform wet chemical etching; Describe the uses of wet chemical etching techniques; Explain the processes in plasma etching techniques used in nanofabrication; Set up and operate equipment to perform plasma etching; Describe the uses of plasma etching techniques; Operate a scanning electron microscope for materials characterization.

Credits:

3.00

Credit Hours:

Prerequisites:

TEL 260 and TEL 261

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.dccc.edu

Phone Number:

(610) 359-5000

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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