TEL 261 - Basic Nanofabrication Process

Institution:

Delaware County Community College

Subject:

Electronics Technology

Description:

This course provides an overview of basic processing steps in Nanofabrication (contact lithography, basic etching and deposition techniques). The majority of the course details a step-by-step description of the equipment and processes needed to fabricate devices and structures. Processing flow will be examined for structures such as microelectronic devices including diode and the MOS capacitor. Students receive an in depth introduction to basic lithography from wafer preparation to final inspection. Contamination issues in nanofabrication are discussed in detail. Students will learn the similarities and differences in both equipment and process flows for each configuration by undertaking "hands-on" processing. Upon successful completion of this course, students should be able to: Perform basic lithography processes; Operate contact lithography equipment; Operate optical microscopes and imaging software; Operate metrology equipment; Explain electrical characterization equipment; Describe the basic steps in p-n junction diode process flow; Identify the equipment in p-n junction diode process flow; Explain the complete p-n diode manufacturing process in a class 10 cleanroom; Describe the basic steps in a MOS capacitor process flow; Identify the equipment in a MOS capacitor process flow; Compare the similarities and differences in equipment and process flow for the process flows listed above.

Credits:

3.00

Credit Hours:

Prerequisites:

TEL 260* (*Course(s) May Be Taken Concurrently)

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.dccc.edu

Phone Number:

(610) 359-5000

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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