SMT 215 - Materials Modification In Nano

Institution:

Lehigh Carbon Community College

Subject:

Nanofabrication

Description:

Covers in detail the processing steps used in modifying material properties in nanofabrication. Included will be growth and annealing processes utilizing and vertical furnaces as well as rapid thermal annealing. The impact of thermal processing on defects, gettering, impurities and overall electrical, mechanical, optical, electrical and chemical properties will be studied. The student will grow and measure gate and field oxides, implant and activate source and drain regions, and evalute thermal budget requirements using state-of-the-art tools. Included also will be other modification technologies such as ion implantation, diffusion and surface prepatation and treatment. Substrate preparation processing such as slicing, etching, polishing and epitaxial growth will be covered.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.lccc.edu

Phone Number:

(610) 799-2121

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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